REBEKA™ - retractable BSE detector for SEM

REBEKA™ - retractable BSE detector for SEM

Rebeka™ represents a new retractable BSE detector for electron microscopy which combines the best available single crystal scintillators manufactured in Crytur with precise high vacuum mechanics and readout electronics in one ready-to-use package.

Key properties

RELIABLE SENSOR	PRECISE MECHANICS
Single crystal sensor Scintillator/PMT principle for ultimate image quality Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV Excellent S/N ratio Unlimited sensor lifetime HV + LV + ESEM operation	Motorized retraction mechanism Bellows-sealed high vacuum system Retraction 150 mm Compact design Precise alignment Customized connection to SEM

Technical parameters

SENSOR UNIT

single crystal scintillator with optimized efficiency and minimized afterglow, exponential decay time 45 ns with 30 photons/keV

Outer diameter 15 mm

Inner hole diameter 3 / 2 / 1.5 or 1 mm. This dimension limits the field of view

Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV

Sensitivity down to 1pA beam current

Thin - allows a working distance down to 2 mm

MECHANICAL UNIT

Dimensions 406 x 100 x 72 mm

Bellows design for ultimate vacuum

150 mm motorized retraction

+/- 2 mm fine adjustment in x, y, z axis

0.02 mm repeatability

Flange adapted to customer's SEM

Silver / black / blue / red matt surface finish available

ELECTRONICS CONTROL UNIT

Dimensions 270 x 180 x 65 mm

Supply 230/110 V

3 noise filters optimized for different scanning speeds

50 MHz bandwidth

Internal source 0-1200 V for PMT HV

Output video signal -1/+1V (-5/+5V)

Full remote software control

DC offset up to -20V

Sample images

Sensitivity at low energies:

Contrast evolution

Evolution of BSE contrast with increasing landing energy

Sample: Chondrules and metal flakes in Ghubara Meteorite, provided by Institute of Geology CAS

Fast scanning speed

Rebeka can operate in a fast scanning speed down to 20 ns / pxl.

Sample: Er / Yb fiber laser - detail, provided by Institute of Photonics and Electronics

BSE and SE image comparison of the same sample

Sample: Lu₃Al₅O₁₂ with Lu₂O₃ crystals

IMAGES ACQUIRED WITH REBEKA

Sample: Ir crystals on ceramic surface

Sample: Sn bond on electronic chip

Sample: Natural garnet crystal

Sample: Hg - Pd - Te provided by Czech geological survey